Sputter Coater

Sputter Coater

Specialist : Dr. Cihat ÖZTEPE

Please first fill out the analysis request form. Our specialist will contact you through the mail address you indicated.

Click here for the analysis request form.

OptoSense Ion Sputtering Coater OPT-SD900 is available in our laboratory.

It is widely used to coat non-conductive SEM samples with Au for better imaging. It is also excellent for surface treatment. Working vacuum pressure can be achieved quickly within 2 minutes when using proper vacuum pump. It generates much less heat. It is user friendly and easy to operate.

Operating Parameters

Vacuum pump set: (Oil required) rotary vacuum pump

Rotary pumping speed: 50 Hz : 8 m³/h (2.2 L/s)/ 60 Hz : 9.6m³/h (2.6 L/s)

Vacuum limit: 2Pa

Max sputtering current: 0-20mA

Working pressure: 30Pa -7 Pa

Vacuuming time: <5 Min(2 Pa)

Vacuum measure: Measuring range from atmosphere to 2*10-2mbar

Gas control: Gas flow controller

Chamber size: Φ150*120mm (height) scratch resistant quartz glass

Magnetron target source: Target size φ 50*0.1mm(Au)/ target source: Au,Ag,Pt

Weight/size: 45kg/360mm length x 300mm wide x 380mm high

Power supply: AC 110V 60Hz or AC 220V 50Hz

Power consumption: <1500W

Cooling method: Air cooling