Sputter Coater

Sputter Coater

Please contact the device specialist before making any requests.

Specialist : Dr. Cihat ÖZTEPE

Phone :
E-mail : cihat.oztepe@bogazici.edu.tr

OptoSense Ion Sputtering Coater OPT-SD900 is available in our laboratory. It is widely used to coat non-conductive SEM samples with Au for better imaging. It is also excellent for surface treatment. Working vacuum pressure can be achieved quickly within 2 minutes when using proper vacuum pump. It generates much less heat. It is user friendly and easy to operate.

Operating Parameters

Vacuum pump set: (Oil required) rotary vacuum pump

Rotary pumping speed: 50 Hz : 8 m³/h (2.2 L/s)/ 60 Hz : 9.6m³/h (2.6 L/s)

Vacuum limit: 2Pa

Max sputtering current: 0-20mA

Working pressure: 30Pa -7 Pa

Vacuuming time: <5 Min(2 Pa)

Vacuum measure: Measuring range from atmosphere to 2*10-2mbar

Gas control: Gas flow controller

Chamber size: Φ150*120mm (height) scratch resistant quartz glass

Magnetron target source: Target size φ 50*0.1mm(Au)/ target source: Au,Ag,Pt

Weight/size: 45kg/360mm length x 300mm wide x 380mm high

Power supply: AC 110V 60Hz or AC 220V 50Hz

Power consumption: <1500W

Cooling method: Air cooling